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Description
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This book provides full coverage of surfaces, interfaces, and film fundamentals for microelectronics, as well as the physics and chemistry of microelectronics processing. Based on a course taught by the author for over 25 years at the University of North Carolina, this book offers a unique and informative blend of fundamental science, processing, and applications.
The content includes the second part of the course on materials science of microelectronics, and the first part is covered in Irene's Electronic Materials Science by Wiley (ISBN 0471695971). This book is written to serve as a stand-alone book and is not dependent on the first book
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